设备名称
atomic force microscope
检测项目
Surface roughness
检测范围
Scanning range: 90um x 90um x 10um
检测精度
Z-direction noise level:<0.5A
XY direction closed-loop noise level:<0.5 nm
atomic force microscope
Surface roughness
Scanning range: 90um x 90um x 10um
Z-direction noise level:<0.5A
XY direction closed-loop noise level:<0.5 nm
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