产品简介
Using imported natural quartz sand and electric melting process, we provide high-purity, low bubble rate, and low OH content quartz materials for semiconductors
应用领域
Quartz components that can be used in high and low temperature areas of semiconductor processes, such as quartz flanges, quartz rings, quartz boats, etc
产品优势
OH≤30ppm， Has extremely high thermal stability. High purity and low bubble rate, avoiding particle generation during plasma etching, high-temperature oxidation and other processes, improving semiconductor process yield.
