设备名称
Laser interferometer
检测项目
Optical uniformity, surface shape
检测范围
Detection caliber: ≤ Ø 600mm
检测精度
Transmission Flat PVr.≤ λ/25(λ=623.8nm)
Reference Flat PVr.≤ λ/25
Optical uniformity detection accuracy ≤ 0.5ppm
Laser interferometer
Optical uniformity, surface shape
Detection caliber: ≤ Ø 600mm
Transmission Flat PVr.≤ λ/25(λ=623.8nm)
Reference Flat PVr.≤ λ/25
Optical uniformity detection accuracy ≤ 0.5ppm
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